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작성자 김채언 작성일21-07-12 13:24관련링크
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고려대학교 이승우 교수님 연구실 김채언 학생입니다.
바이오 센싱 관련실험을 진행을 위한 그래핀 기판 문의 드립니다.
필요한 그래핀 기판은 아래 두가지 품목입니다.
1. graphene film on Cu ( 60mm*40mm)
< graphene film >
- growth method : CVD synthesis
- appearance (color) transparent
- transparency: >97%
- coverage : >95%
- number of graphene layers : 1
- thickness(theoretical) : 0.345nm
- AFM thickness (air @RT) : <1nm
- electron mobility on SiO2/Si : ≈1500 cm2/V·s
- sheet resistance on SiO2/Si : 450±40 Ohms/sq (1cm x1cm)
- grain size : up to 20um
<Substrate Cu foil>
- · Thickness: 18 μm
- · Roughness: around 80 nm
- Pretreated for easier bottom layer removal: Monolayer
< graphene film >
- growth method : CVD synthesis
- appearance (color) transparent
- transparency: >97%
- coverage : >95%
- number of graphene layers : 1
- thickness(theoretical) : 0.345nm
- AFM thickness (air @RT) : <1nm
- electron mobility on SiO2/Si : ≈1500 cm2/V·s
- sheet resistance on SiO2/Si : 450±40 Ohms/sq (1cm x1cm)
- grain size : up to 20um
<substrate SiO2/Si>
- dry oxide thickness(both sides ) : 90nm(+/-5%)
- type/ dopant : P/B
- orentation: <100>
- resistivity : 1-10ohm'cm
- - Thickness 4" wafer: 525 +/- 20 μm
- - Thickness 6" wafer: 675 +/- 20 μm
- - Front surface: Polished
- - Dielectric Constant of the SiO2 layer: 3.9
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